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Proceedings Paper

Optical constants of thin CVD-Tungsten oxide films
Author(s): Anna M. Szekeres; D. S. Gogova
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Paper Abstract

CVD-tungsten oxides were obtained at 300 degree(s)C on glass substrates by pyrolitical decomposition of W(CO)6 vapor in argon/oxygen stream at atmospheric pressure. The thin films were examined by spectroscopic ellipsometry in the wavelength range of 0.3 - 0.8 micrometers . It was found that as- deposited oxides are rather porous and predominantly amorphous but crystalline phase is also present. During the annealing at 450 and 500 degree(s)C the oxide becomes fully crystallized and yet it preserves its porosity. The high level of porosity is reflected in the low values of the refractive indices (1.9 - 1.5) and the optical band gap energies (3.04 - 3.11 eV).

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.321009
Show Author Affiliations
Anna M. Szekeres, Institute of Solid State Physics (Bulgaria)
D. S. Gogova, Central Lab. for Solar Energy and New Energy Sources (Bulgaria)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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