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Proceedings Paper

Laser-assisted chemical vapor deposition of diamond microstructures
Author(s): Zsolt Toth; Adam Mechler; Peter Heszler
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Paper Abstract

High quality diamond has been deposited area selectivity onto thin tungsten films layered onto fused silica substrates in a hot filament CVD reactor. The deposition method uses a hot filament process which is combined with localized heating by a focused Nd-YAG laser beam.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320995
Show Author Affiliations
Zsolt Toth, Research Group on Laser Physics (Hungary)
Adam Mechler, JATE Univ. (Hungary)
Peter Heszler, Research Group on Laser Physics (Sweden)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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