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Proceedings Paper

High-optical-quality LiNbO3 thin films obtained by pulsed laser deposition
Author(s): D. Ghica; Mariuca Gartner; F. Ciobanu; V. Nelea; C. Martin; Ion N. Mihailescu
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Paper Abstract

We report the successful growth of high optical quality LiNbO3 thin films (high birefringence and good transparency over the entire visible spectral range) by pulse laser deposition (PLD) on Si substrates. PLD of a LiNbO3 single-crystal target was carried out using a KrF* excimer laser ((lambda) equals 248 nm, E equals 80 mJ, (tau) equals 20 ns, v equals 2 Hz). The thin films have been deposited in oxygen and, for some of them, a thermal treatment has been applied in an oxygen atmosphere. The thin films have been characterized by grazing incidence X-ray diffraction, spectroscopic ellipsometry and Fourier transform infrared spectroscopy.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320993
Show Author Affiliations
D. Ghica, National Institute of Optoelectronics (Romania)
Mariuca Gartner, Institute of Physical Chemistry (Romania)
F. Ciobanu, SIMULTEC SA (Romania)
V. Nelea, ENSAIS (France)
C. Martin, National Institute of Laser, Plasma and Radiation Physics (Romania)
Ion N. Mihailescu, National Institute of Laser, Plasma and Radiation Physics (Romania)

Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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