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Proceedings Paper

Excimer-laser-beam homogenization for materials processing
Author(s): Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Paper Abstract

The paper presents an analysis of non-imaging integrators, which can be used for laser beam homogenization for materials processing with excimer laser radiation. A model for the transversal degree of coherence of the laser radiation is presented in order to estimate the performance of the integrating devices for the partially coherent excimer laser radiation. This is necessary for a more relevant design of those elements than a design by geometric optical means only.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320992
Show Author Affiliations
Lars Unnebrink, RWTH Aachen (Germany)
Thomas F. E. Henning, Fraunhofer-Institut fuer Lasertechnik (Germany)
Ernst-Wolfgang Kreutz, Technical Univ. Aachen (Germany)
Reinhart Poprawe, RWTH Aachen and Fraunhofer-Institut fuer Lasertechnik (Germany)

Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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