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Proceedings Paper

Femtosecond UV-laser ablation of solid targets
Author(s): Peter Simon
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Paper Abstract

Ablation of submicron structures on metals and semiconductors by short ultraviolet laser pulses (0.5 - 50 ps, 248 nm) is presented. Features like periodic line structures with a line-spacing below 400 nm, and holes with diameters well below 1 micrometers are produced on the sample surface by single laser shot exposure. The structures are projection printed by a Schwarzschild-objective (NA equals 0.4) in air environment. The dynamics of the surface modification has been studied using a pump-probe technique. The ablated grating structure is illuminated with a second, weak probe pulse (500 fs at 496 nm) whose diffracted light (0th, 1st, 2nd order signals) is recorded as a function of the delay between the two pulses. The results provide valuable time- resolved information about the change of the surface morphology.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320988
Show Author Affiliations
Peter Simon, Laser-Lab. Goettingen eV (Germany)

Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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