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Proceedings Paper

Makyoh-topography studies of mirrorlike surfaces: toward a quantitative understanding
Author(s): Ferenc Riesz
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Paper Abstract

A quantitative approach to the Makyoh-topography image formation mechanism is presented. General relations are given on the optical settings. Then, optical ray-tracing simulations of an isolated defect (hillock or depression) and a periodic (sinusoidal) surface are presented for different optical settings. Optimum working conditions are established, and general features of the imaging are pointed out. Supporting experimental images of semiconductor samples are shown.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.320948
Show Author Affiliations
Ferenc Riesz, Research Institute for Technical Physics and Materials Science (Hungary)

Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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