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Proceedings Paper

Particle arrangement method and the fixing of arranged particles in the particle assemblage
Author(s): Mikihiko Kobayashi; Hiroshi Fudouzi; Mitsuru Egashira; Norio Shinya
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Paper Abstract

Five micrometers silica particles can be arranged on CaTiO3 substrates by drawing an electrified pattern on the substrate (drawing step) and then dipping it in a suspension of the particles (arranging step). The fixing treatment of the arranged particles is necessary in order to repeat the above two steps and to fabricate 3D micro-structures. A thin film of the fluoride polymer is formed on the substrate after the particle arrangement to fix the arranged particles. The effect of the coating film on the drawing step and arranging step was studied. It was found that the coating film improved both steps rather than cause interference. The drawing, arranging and fixing are the elemental techniques of the particle arrangement process, and 3D micro-structures can be constructed by repeating these steps in order. Application of the process to a gas sensor was discussed.

Paper Details

Date Published: 20 July 1998
PDF: 9 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320199
Show Author Affiliations
Mikihiko Kobayashi, National Research Institute for Metals (Japan)
Hiroshi Fudouzi, National Research Institute for Metals (Japan)
Mitsuru Egashira, National Research Institute for Metals (Japan)
Norio Shinya, National Research Institute for Metals (Japan)

Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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