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Proceedings Paper

MEMS system design and verification tools
Author(s): Mary Ann Perez-Maher; Hee Jung Lee
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Paper Abstract

Although MEMS device designers currently make use of process simulation, 3D visualization and finite element/boundary element analysis tools, MEMS systems designers lack the design and verification tools enjoyed by electronic circuit and systems designers. System level and circuit level simulation tools for MEMS are beginning to become available, but an important issue is the availability of macromodels. This paper discusses an integrated CAD tool suite based on extensions to VLSI electronic circuit and systems tools to handle signals in multiple energy domains. These tools maintain synchronized physical, structural and behavioral design views and work in conjunction with a library of MEMS schematic symbols, layout generators, and behavioral models. Integration of electronic circuit and systems tools and MEMS systems tools allow designers to address the important problems of ensuring system performance goals are met, system partitioning and determining the degree of integration of sensing/actuating devices and interface/calibration electronics. These new physical design and simulation tools are applied to fabricated design examples and the results are critiqued. Discussions of the merits and limitations of our tools and other design tools is also included. Links between system level tools and MEMS device design tools are also described.

Paper Details

Date Published: 20 July 1998
PDF: 9 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320196
Show Author Affiliations
Mary Ann Perez-Maher, Tanner Research (United States)
Hee Jung Lee, Tanner Research (France)

Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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