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Proceedings Paper

Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring
Author(s): Jeffrey N. Schoess; J. David Zook
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Paper Abstract

An acoustic emission (AE) sensor has been developed by Honeywell Technology Center for avionics, industrial control, and military applications. The AE sensor design is based on an integrated silicon microstructure, a resonant microbeam with micron-level feature size, and frequency sensitivity up to 500 kHz. The AE sensor has been demonstrated successfully in the laboratory test environment to sense and characterize a simulated AE even for structural fatigue crack monitoring applications. The technical design approach and laboratory test results are presented.

Paper Details

Date Published: 20 July 1998
PDF: 7 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320185
Show Author Affiliations
Jeffrey N. Schoess, Honeywell Technology Ctr. (United States)
J. David Zook, Honeywell Technology Ctr. (United States)


Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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