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Proceedings Paper

Surface-micromachined optical polarizers for magneto-optical data storage
Author(s): Chuan Pu; Zuhua Zhu; Yu-Hwa Lo
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Paper Abstract

Polarizers and polarization beam splitters are the most important devices in magneto-optical readout system. With a commercially available foundry polysilicon surface micromachining process (Multi-User Means ProcesS, or MUMPS) offered by MCNC (Mems Center at North Carolina), we have realized, on a single Si chip, an integrated polarization beam splitting system with a binary phase Fresnel lens for collimation. Polarization extinction ratios of 10 dB for the transmitted light and over 20 dB for the reflected light have been achieved. The whole system is prealigned using Computer-Aided Design on a Si substrate and is then lifted up perpendicular to the substrate after structure release.

Paper Details

Date Published: 20 July 1998
PDF: 8 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320183
Show Author Affiliations
Chuan Pu, Cornell Univ. (United States)
Zuhua Zhu, Cornell Univ. (United States)
Yu-Hwa Lo, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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