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Proceedings Paper

Systematic design of microactuators using topology optimization
Author(s): Ole Sigmund
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Paper Abstract

Systematic design methods for MicroElectroMechanical Systems (MEMS) have been lacking and typical design procedures encompass trial and error approaches. This paper discusses the application of the topology optimization method as a systematic tool for MEMS design. The topology optimization method distributes one or more passive or active materials in a design domain, such that some output performance is optimized. Here, the method is applied to the design of thermal or electrothermal micro actuators where the output work performed on a workpiece of given stiffness is to be maximized. It is shown that actuators with either large output displacement or large output force can be designed by specifying low or high stiffness of the workpiece, respectively. The optimal topologies are strongly dependent on the stiffness of the workpiece as well.

Paper Details

Date Published: 20 July 1998
PDF: 9 pages
Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); doi: 10.1117/12.320179
Show Author Affiliations
Ole Sigmund, Technical Univ. of Denmark (Denmark)


Published in SPIE Proceedings Vol. 3328:
Smart Structures and Materials 1998: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter; Richard A. Singer; Michael J. Vellekoop, Editor(s)

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