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Proceedings Paper

Lie algebraic method for calculating high-order canonical magnetic deflection aberrations
Author(s): Kangyan Hu; Jingping Zhu; Tiantong Tang
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Paper Abstract

Lie algebraic aberration theory is developed and applied to magnetic deflection systems. Employing this new algebraic tool, all third- and fifth-order canonical magnetic deflection aberrations (including canonical position and momentum aberrations at arbitrary observation planes) are derived. The results are in exactly agreement with those obtained by the conventional successive approximation aberration theory. The present paper lays a theoretical groundwork for further studies on Lie algebraic theory for calculating higher-order aberrations of scanning probe systems.

Paper Details

Date Published: 18 August 1998
PDF: 10 pages
Proc. SPIE 3560, Display Devices and Systems II, (18 August 1998); doi: 10.1117/12.319678
Show Author Affiliations
Kangyan Hu, Xi'an Jiaotong Univ. (China)
Jingping Zhu, Xi'an Jiaotong Univ. (China)
Tiantong Tang, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 3560:
Display Devices and Systems II
Shou-Qian Ding; Bao Gang Wu, Editor(s)

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