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Proceedings Paper

Thermal stability of magneto-optical properties in TbFeCo films prepared by rf-magnetron sputtering
Author(s): Rui Xiong; Zuoyi Li; Xiaofei Yang; Zuoqi Hu; Zheng Li; Gengqi Li
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Paper Abstract

The thermal stability of amorphous TbFeCo films covered with the protected AlN films prepared by the RF magnetron sputtering system was studied, in order to understand the degradation kinetics in rare-earth transition metal films. The changes of anisotropy Ku, Kerr rotation angle (theta) k and coercivity Hc with annealing time were measured with the automatic magnetic torque apparatus and the automatic measurement system of MO Kerr effect, respectively. Data clearly show that stress relaxation is responsible for the decrease in the magneto-optical properties after thermal annealing. Furthermore, annealing studies reveal that the thermal stability of magneto-optical properties improves with increasing Ar sputtering pressure-- a trend that is in conflict with the tendency for films sputtered under low Ar pressure to be more oxidation resistant. This trend is attributed to the large stress component that exists at low Ar pressures and its tendency to decrease as a result of annealing.

Paper Details

Date Published: 10 August 1998
PDF: 6 pages
Proc. SPIE 3562, Optical Storage Technology, (10 August 1998); doi: 10.1117/12.318492
Show Author Affiliations
Rui Xiong, Huazhong Univ. of Science and Technology (China)
Zuoyi Li, Huazhong Univ. of Science and Technology (China)
Xiaofei Yang, Huazhong Univ. of Science and Technology (China)
Zuoqi Hu, Huzong Univ. of Science and Technology (China)
Zheng Li, Huazhong Univ. of Science and Technology (China)
Gengqi Li, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 3562:
Optical Storage Technology
Duanyi Xu; Seiya Ogawa, Editor(s)

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