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Proceedings Paper

Topography measurement by changing distance
Author(s): Yingjie Yu; Pengsheng Li; Xifu Qiang
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Paper Abstract

The paper describes the method to get a small sampling step by changing the distance between light point in the heterodyne interferometer. And it gives the method to measure topography. Finally, it analyzes the measurement error.

Paper Details

Date Published: 10 August 1998
PDF: 6 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318432
Show Author Affiliations
Yingjie Yu, Harbin Institute of Technology (China)
Pengsheng Li, Harbin Institute of Technology (China)
Xifu Qiang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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