Share Email Print
cover

Proceedings Paper

Real-time error compensation of coordinate measurement system using combined gratings
Author(s): Wenjun Tang; Yukun Zhang; Minmo Duan; Lihua Li; Zhongyan Fang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper is concerned with enhancing the accuracy of the coordinate measurement system by compensating the Abbe error in real-time through combined gratings. This research is carried out on a 2D measuring system with a maximum moving range of 200mm X 100mm. According to its structure, a mathematical model using the rigid body assumption is deduced and altogether five metrology gratings are installed along two moving axes to compensate three angel errors according to this model. A special grating subdividing system is designed to realize 200 times subdivision for each of the five gratings. Experiment shows that this system can largely raise the accuracy of the coordinate measurement device. Besides, this research is also very valuable in the upgrading of machine tools.

Paper Details

Date Published: 10 August 1998
PDF: 10 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318411
Show Author Affiliations
Wenjun Tang, Tsinghua Univ. (China)
Yukun Zhang, Tsinghua Univ. (China)
Minmo Duan, Tsinghua Univ. (China)
Lihua Li, Tsinghua Univ. (China)
Zhongyan Fang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

© SPIE. Terms of Use
Back to Top