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Proceedings Paper

Portable laser roughometer
Author(s): Shihua Wang; Jun Wu
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Paper Abstract

A portable laser roughometer based on the principle of laser scattering on machined surface is described in this paper. The laser diode and novel telecentric optical system are adopted and the light-scattering band modulated from rough surface of sample is processed by the way of half scattering band of light. So, the measuring result is insensitivity to position of sample. The measuring range: Ra value from 0.005 micrometers to 2 micrometers . The contradictory between better measuring accuracy and larger measuring range is solved effectively. Besides, sample which has special form and internal surface can be measured with different accessories. The instrument is simple in structure and easy to handle. This noncontact measuring device also has sufficient measuring accuracy for practical uses.

Paper Details

Date Published: 10 August 1998
PDF: 5 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318404
Show Author Affiliations
Shihua Wang, Chengdu Univ. of Science and Technology (Singapore)
Jun Wu, Chengdu Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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