Share Email Print
cover

Proceedings Paper

Submicron position and measurement system for optical edges
Author(s): JiaHu Yuan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Optical edges refer to the cut-lines of difference of optical transmissivity. They exist widely on optical coder. Generally the accuracy of edge's positions shows its quality. This paper describes an opto-electric measuring scheme, which integrates the edge's signal by means of linear CCD camera and identifies automatically its position through computer analysis. In the meantime a precise grating is used as measuring unit and a 2D scanning stage which is derived by stepping motors is designed for searching the edges. A microcomputer performs the functions of the system management, data sample and analysis. The measuring error is less than 0.3 micrometers .

Paper Details

Date Published: 10 August 1998
PDF: 5 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318401
Show Author Affiliations
JiaHu Yuan, Chengdu Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

© SPIE. Terms of Use
Back to Top