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Proceedings Paper

Realization of spherical absolute testing
Author(s): Qingyun Wang; Rihong Zhu; Jinbang Chen; Lei Chen
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Paper Abstract

Today, high quantities lens is more and more important to the optic-electric fields, and it brought about the demand of high accuracy testing of spherical surfaces. Absolute interferometric testing of spherical surfaces is a technical basis for establishing the spherical standard, and it is also an important application of computer aid interferometry. Partly work in the course of establishing the national spherical standard is introduced. A new method based on image processing has been developed instead of typical absolute testing which requires an eight-dimension mount whose cost is expensive and adjustment is very difficult. Interferograms sampled by phase-shifting interferometry can be processed to recognize the border of spherical surfaces. The key coefficients of position are in real time feedback to the operator to adjusting sphere precisely relative to the interferometer. This method can get more accuracy because of the high unison of three interferograms. This paper shows results of testing a 1/10 wave P-V sphere using two aplanats. It is easy to measure spherical surfaces to the accuracy better than 1/15 wave p- v.

Paper Details

Date Published: 10 August 1998
PDF: 6 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318400
Show Author Affiliations
Qingyun Wang, Nanjing Univ. of Science and Technology (China)
Rihong Zhu, Nanjing Univ. of Science and Technology (China)
Jinbang Chen, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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