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Proceedings Paper

Large-scale form and position error measurement
Author(s): Qun Hao; Dacheng Li
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Paper Abstract

A research on measuring form and position deviations of large scale dimension using laser diode, optical fiber and phase plate diffraction alignment technique and a matrix CCD detecting technique was proposed in this paper. The principle of laser alignment using a (pi) step phase plate was analyzed theoretically and calculated using a computer numerically. Also in the paper, the operation principle and signal processing methods of a matrix CCD that used to detect the deviation absolutely were stated. It was emphasized on introducing some of large-scale form and position errors measuring system and the measurement accuracy of these systems are given. The comparing experiment result with HP5528 exhibited that the accuracy of the system coincides with the one of HP5528 in the straightness measurement.

Paper Details

Date Published: 10 August 1998
PDF: 5 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318386
Show Author Affiliations
Qun Hao, Beijing Institute of Technology (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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