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Proceedings Paper

Interference measurements for roughness of silicon mirror with Twyman interferometer
Author(s): Yaoning Zhang; Xiaoli Zhang; ZuHai Cheng
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Paper Abstract

Supposed the random distribution of height deviation can be represented as Gaussian distribution, the relationship between intensity contrast C of interference fringes, determined at Twyman Interferometer, and the roughness (sigma) of mirror's surface is deduced. Roughness measurements of four silicon mirrors have performed with Twyman Interferometer. The result of measurements is agree with the data, measured by 6JA profiler in tendency. This method is a full-field, noncontacting interference measurement so that it can be developed as an inspection on line. Then, the surface profile analysis can also be performed from interference fringes. Therefore this method provide a controlling way in polish process.

Paper Details

Date Published: 10 August 1998
PDF: 4 pages
Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); doi: 10.1117/12.318376
Show Author Affiliations
Yaoning Zhang, Huazhong Univ. of Science and Technology (China)
Xiaoli Zhang, Huazhong Univ. of Science and Technology (Canada)
ZuHai Cheng, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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