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Proceedings Paper

Evaluation of optical supersmooth surface using AFM and comparison to interference method
Author(s): Jianbai Li; Dachen Li; Xiaoli Zhang; Xiaoyun Li; Anging Zhuo
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Paper Abstract

In this paper, authors had presented an Atomic Force Microscope (AFM) method, which can test more parameters of supersmooth surface, e.g. P-V value, arithmetic mean Ra, root mean square Rq and micro-defect on surface micro- profile. The research results presented in the paper presented that the method has importance application for studying optical supersmooth surface in components of soft x-ray optics, high intensity optics and high power solid- state laser. The method can arrive at nanometer and subnanometer grade resolution in evaluating the supersmooth surface microprofile. The comparison between AFM and classical interferometer method is given in the paper.

Paper Details

Date Published: 5 August 1998
PDF: 9 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318330
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Dachen Li, Tsinghua Univ. (China)
Xiaoli Zhang, Jiangxi Academy of Sciences (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Anging Zhuo, Jiangxi Academy of Sciences (China)

Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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