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Proceedings Paper

Common-path interference profiler with nondestructive testing of a supersmooth surface
Author(s): Yongying Yang; Yongmo Zhuo; Huashan Cheng
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Paper Abstract

The paper described a double-focus interference profiler, its characteristics as below: There isn't standard reference mirror in the instrument. Non-destructive testing is operated for surface. It will be valid for rejecting various noises using interference and electronic common-mode processing system. All measurements are carried out by computer then surface roughness parameters are displayed. The results are compared with commercial WYKO and identity is very well. The instrument is suitable for testing nanometer and sub-nanometer surface, especially soft materials and films. The instrument has a sensitivity to height of 0.1 nm and the lateral sensitivity 1 micrometers .

Paper Details

Date Published: 5 August 1998
PDF: 5 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318328
Show Author Affiliations
Yongying Yang, Zhejiang Univ. (China)
Yongmo Zhuo, Zhejiang Univ. (China)
Huashan Cheng, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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