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Proceedings Paper

Zone plate interferometer for testing aspherical surfaces
Author(s): Qiming Xin; Fengxian Quan
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Paper Abstract

The recent development and application of the technique of using zone plate interferometry to test aspherical surfaces are summarized. The advantages and disadvantages of several types of zone-plate interferometer are given. The principle and method for testing aspherical surfaces using a modified zone-plane (MZP) are described. The relation between installation of MZP and measurement precision is analyzed. The design of MZP is modified to eliminate the curvature at the border of the interference pattern. At last, some experimental results are given.

Paper Details

Date Published: 5 August 1998
PDF: 5 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318326
Show Author Affiliations
Qiming Xin, Beijing Institute of Technology (China)
Fengxian Quan, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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