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Proceedings Paper

Testing method on nanometer-grade true microprofile of optical surface
Author(s): Jianbai Li; Xiaoyun Li; Aihan Ying; Shaorong Xiao; Ming Wang; Anging Zhuo
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Paper Abstract

In this paper, the new method on testing and evaluating of optical surface microprofile using Atomic Force Microscope (AFM), which has both good vertical and lateral resolution. The nanometer-grade microprofile of super-smooth optical surface can be obtained using AFM method, but can't by classical interferometer, as the latter has a poor lateral resolution. Some tested examples of optical surface are shown in the paper. The microprofile images are viewed in monitor and printed in microcomputer.

Paper Details

Date Published: 5 August 1998
PDF: 6 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318318
Show Author Affiliations
Jianbai Li, Jiangxi Academy of Sciences (China)
Xiaoyun Li, Jiangxi Academy of Sciences (China)
Aihan Ying, Jiangxi Academy of Sciences (China)
Shaorong Xiao, Nanchang Univ. (China)
Ming Wang, Nanchang Univ. (Japan)
Anging Zhuo, Jiangxi Academy of Sciences (China)

Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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