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Proceedings Paper

New method of copying a microradial grating
Author(s): Hong-Lin Yu
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Paper Abstract

Based on theoretical analysis and experiments, a new method of copying micro-radial grating having division diameter less than 30 mm is proposed. It solves effectively the problem of contacting poor between the pattern plate and the copied radial grating during the copy process and the problem of great losses on accuracy and contrast.

Paper Details

Date Published: 5 August 1998
PDF: 2 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318313
Show Author Affiliations
Hong-Lin Yu, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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