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Proceedings Paper

Analysis of errors and calibration method for manufacturing multilevel diffractive optical element by ion etching
Author(s): Yongqi Fu; Zhenwu Lu; Yueying Ma; Zhicheng Weng
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Paper Abstract

Fabrication errors and its affecting factors were analyzed for multilevel DOE in this paper. A method of Moire fringe alignment was put forth. It was proved by actual manufacturing that this way is available for aligning positioning error.

Paper Details

Date Published: 5 August 1998
PDF: 4 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318298
Show Author Affiliations
Yongqi Fu, Changchun Institute of Optics and Fine Mechanics (China)
Zhenwu Lu, Changchun Institute of Optics and Fine Mechanics (China)
Yueying Ma, Changchun Institute of Optics and Fine Mechanics (China)
Zhicheng Weng, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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