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Proceedings Paper

Signal-chip microcomputer control system for a diffraction grating ruling engine
Author(s): Xiaolin Wang; Yuhua Zhang; Houmin Yang; Du Guo
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Paper Abstract

A control system with a chip of 8031 single-chip microcomputer as its nucleus for a diffraction grating ruling engine has been developed, its hardware and software are presented in this paper. A series of techniques such as program-controlled amplifier and interference fringes subdivision as well as motor velocity step governing are adopted to improve the control accuracy. With this control system, 8 kinds of gratings of different spacings can be ruled, the positioning precision of the diffraction grating ruling engine (sigma) equals 3.6 nm, and the maximum positioning error is less than 14.6 nm.

Paper Details

Date Published: 5 August 1998
PDF: 7 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318295
Show Author Affiliations
Xiaolin Wang, Beijing Institute of Technology (China)
Yuhua Zhang, Beijing Institute of Technology (China)
Houmin Yang, Changchun Institute of Optics and Fine Mechanics (China)
Du Guo, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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