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Proceedings Paper

Design and fabrication of 256x256 diffractive microlens arrays on Si substrates
Author(s): Yi Li; Xinjian Yi; Jianhua Hao
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Paper Abstract

256 X 256 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3 - 5 micrometers wavelength with a microlens size of 100 micrometers . The lens F number and array pitch are 1.5 and 100 micrometers , respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.

Paper Details

Date Published: 5 August 1998
PDF: 6 pages
Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); doi: 10.1117/12.318293
Show Author Affiliations
Yi Li, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)
Jianhua Hao, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3557:
Current Developments in Optical Elements and Manufacturing
Qiming Xin; Robert E. Parks, Editor(s)

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