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Proceedings Paper

Experimental research on the scanning performance of a four-segmented PZT tube
Author(s): Xiumei Liu; Jia Wang; Dacheng Li
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Paper Abstract

A four-segmented piezoelectric tube performs XYZ spatial scanning in a SPM system. The measurement of characteristics including scanning range, accuracy, linearity and the lowest resonant frequency are essential to obtain a reliable image and get information about the scanning velocity. An optical fiber laser interferometer capable of vibration measurement is used to characterize the scanning tube with the inner diameter of 6mm, thickness 1mm and length 25mm is measured. We find that the lowest resonant frequency is much lower than the calculated result. The low resonant frequency will limit the scanning velocity and influence the quality of the obtained image greatly. In addition, the non-linearity curve can be obtained by driving the scanning tube with a triangle wave slowly. The measurement is easy, quick and continuous. In addition, we measure the non-linearity statically by inductive micrometer as well. The two results are compared. The result shows that there is difference between them.

Paper Details

Date Published: 13 August 1998
PDF: 4 pages
Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); doi: 10.1117/12.318156
Show Author Affiliations
Xiumei Liu, Tsinghua Univ. (China)
Jia Wang, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 3555:
Optical and Fiber Optic Sensor Systems
Shanglian Huang; Kim D. Bennett; David A. Jackson, Editor(s)

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