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Proceedings Paper

Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor
Author(s): Hai Ming; Xiaohong Sun; Ming Bai; Zhongcheng Liang; Guoping Zhang; Hui Li; Yunxia Wu; Jiangping Xie; Jizu Shu
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Paper Abstract

By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO4 laser and 3D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro- surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.

Paper Details

Date Published: 13 August 1998
PDF: 5 pages
Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); doi: 10.1117/12.318154
Show Author Affiliations
Hai Ming, Univ. of Science and Technology of China (China)
Xiaohong Sun, Univ. of Science and Technology of China (China)
Ming Bai, Univ. of Science and Technology of China (China)
Zhongcheng Liang, Univ. of Science and Technology of China (China)
Guoping Zhang, Univ. of Science and Technology of China (China)
Hui Li, Univ. of Science and Technology of China (United States)
Yunxia Wu, Univ. of Science and Technology of China (China)
Jiangping Xie, Univ. of Science and Technology of China (China)
Jizu Shu, NMIC (China)


Published in SPIE Proceedings Vol. 3555:
Optical and Fiber Optic Sensor Systems
Shanglian Huang; Kim D. Bennett; David A. Jackson, Editor(s)

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