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Proceedings Paper

Optical sensitivity to NOx of Ag-doped ZnO thin films
Author(s): Hongbo He; Zhengxiu Fan
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Paper Abstract

In this paper, pure and Ag-doped zinc oxide (ZnO) optical sensing thin films were deposited by reactive magnetron sputtering (rf) for detection of nitrogen oxide (NOx) gas. The optical sensitivity was tested in a vacuum system by introducing NOx. The transmission spectra of these films were measured at first, then the variation of sensitivity was derived form the transmission spectra. It was found that the sensitivity to NOx of Ag-doped ZnO films was higher than that of pure ZnO films. The changes of sensitivity with NOx pressure and concentration of dopant Ag were also studied in the paper. The concentration of dopant Ag varies form 1 percent to 18 percent, which was examined by Auger Electron Spectroscopy. The best sensitivity to NOx was achieved with ZnO optical sensing thin film which was doped by 5 percent Ag. It may be developed by considering the Langmuir-type adsorption equilibrium relation and it shows that the theoretic analyses coincide excellently with the experimental results.

Paper Details

Date Published: 13 August 1998
PDF: 6 pages
Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); doi: 10.1117/12.318151
Show Author Affiliations
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 3555:
Optical and Fiber Optic Sensor Systems
Shanglian Huang; Kim D. Bennett; David A. Jackson, Editor(s)

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