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Proceedings Paper

System for measurement of CCD parameters
Author(s): Rihong Zhu; Daocai Xiang; Zhixing Yang; Jinbang Chen
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Paper Abstract

This paper presents a system for measurement of CCD parameters that combines a photo-injection system and auto- focus systems. In the photo-injection system, a reverse microscope with plano-achromatic objective is used to produce a small light spot of (Phi) 2 micrometers . In the auto- focus system, astigmatic auto-focus method is applied. The auto-focus signal is detected by a simulation quadrate simulated by CCD. A piezoelectric transducer with high sensitivity and resolution is used to drive the focusing objective for a real-time control of the position of the small light spot which was required to be injected into one of pixels of CCD measured.

Paper Details

Date Published: 11 August 1998
PDF: 5 pages
Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); doi: 10.1117/12.318089
Show Author Affiliations
Rihong Zhu, Nanjing Univ. of Science and Technology (China)
Daocai Xiang, Nanjing Univ. of Science and Technology (China)
Zhixing Yang, Nanjing Univ. of Science and Technology (China)
Jinbang Chen, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3553:
Detectors, Focal Plane Arrays, and Imaging Devices II
Pingzhi Liang; Marc Wigdor; William G. D. Frederick, Editor(s)

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