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Proceedings Paper

GaAs 1x4 optical power splitter
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Paper Abstract

In this paper, an optical power splitter based on MMI coupler in GaAs/GaAlAs heterostructure materials is fabricated. The epitaxial materials are grown by MBE. The dry etching process is applied to fabricate the ribs in this device. The measuring results are presented.

Paper Details

Date Published: 12 August 1998
PDF: 5 pages
Proc. SPIE 3551, Integrated Optoelectronics II, (12 August 1998); doi: 10.1117/12.317987
Show Author Affiliations
Jianyi Yang, Zhejiang Univ. (China)
Minghua Wang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 3551:
Integrated Optoelectronics II
BingKun Zhou; Ray T. Chen, Editor(s)

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