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Proceedings Paper

Laser-assisted chemical vapor deposition of diamond films
Author(s): Deming Ren; Xiaoyong Hu; Fengmei M. Liu; Yanchen Qu; Jingshan Zhao
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Paper Abstract

In this paper, it is reported that diamond films have been synthesized by the Laser Assisted Chemical Vapor Deposition (LACVD) method using the mixture of acetone and hydrogen. The XeCl excimer laser with a wavelength of 308 nm has been utilized as photo-dissociation energy source for carbohydrate, and H2 has been predissociated by hot filament at the temperature of 2000 degrees Celsius. P-type silicone was employed as substrate, which temperature was controlled at about 800 degrees Celsius. The specimens deposited by the method of LACVD were analyzed and evaluated by Raman spectroscopy and scanning electronics microscopy (SEM) accordingly. A character peak of diamond films at 1332 cm-1 can be observed from Raman spectrum. The experimental result have shown that a high-quality diamond film can be obtained.

Paper Details

Date Published: 15 August 1998
PDF: 4 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317961
Show Author Affiliations
Deming Ren, Harbin Institute of Technology (China)
Xiaoyong Hu, Harbin Institute of Technology (China)
Fengmei M. Liu, Harbin Institute of Technology (China)
Yanchen Qu, Harbin Institute of Technology (China)
Jingshan Zhao, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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