Share Email Print
cover

Proceedings Paper

Excimer laser deep microstructuring for LIGA process
Author(s): Beijun Shen; Runwen Wang; Dunwu Lu; Huijie Huang; Longlong Du
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

LIGA process technique is a three-dimensional micromachining technology which is applied to fabricate 3D micromechanical parts. Because the LIGA process requires synchrotron radiation for deep-etch X-ray lithography, few can utilized this technique. In order to solve this problem, many efforts have been made in the world. In Shanghai Institute of Optics and Fine Mechanics, an evolutionary process named Laser LIGA process is being developed. The recent progresses in the development of this process is reported. The mechanism of UV laser ablation, the design of experiment apparatus and the experiment procedures for fabrication of micromechanical parts are introduced. In the end of the paper the experiment result is presented, which is a (phi) 500 micrometer micro-gear of 220 micrometer depth.

Paper Details

Date Published: 15 August 1998
PDF: 7 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317927
Show Author Affiliations
Beijun Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Runwen Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Dunwu Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Huijie Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Longlong Du, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

© SPIE. Terms of Use
Back to Top