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Proceedings Paper

Low-debris plasma source produced by high-power laser
Author(s): Jinquang Lin; Xiaowei Song; Bo Chen; Jianlin Cao
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Paper Abstract

Laser-produced plasma is an attractive table-top x-ray source for many applications, such as microscopy and lithography. Soft x-ray conversion efficiency depends strongly on the laser parameters in use and the produced debris with metal target is an intolerable side-effect in some applications. In this paper, we will optimize laser parameters for the yield of soft x-ray, give the experimental results of low debris solid state CO2 target.

Paper Details

Date Published: 15 August 1998
PDF: 4 pages
Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, (15 August 1998); doi: 10.1117/12.317924
Show Author Affiliations
Jinquang Lin, Changchun Institute of Optics and Fine Mechanics (China)
Xiaowei Song, Changchun Institute of Optics and Fine Mechanics (China)
Bo Chen, Changchun Institute of Optics and Fine Mechanics (China)
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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