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Proceedings Paper

High-performance CCD on high-resistivity silicon
Author(s): Richard J. Stover; Mingzhi Wei; Y. Lee; David Kirk Gilmore; Steven E. Holland; Donald E. Groom; William W. Moses; Saul Perlmutter; Gerson Goldhaber; Carlton R. Pennypacker; N. W. Wang; Nicholas P. Palaio
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Paper Abstract

In this paper we present new results from the characterization of a fully depleted CCD on high resistivity silicon. The CCD was fabricated at Lawrence Berkeley National Laboratory on a 10-12 K(Omega) -cm n-type silicon substrate. The CCD is a 200 by 200 15-micrometers square pixel array. The high resistivity of the starting material makes it possible to deplete the entire 300 micrometers thick substrate. This results in improved red and near IR response compared to a standard CCD. Because the substrate is fully depleted, thinning of the CCD is not required for backside illumination, and the result presented here were obtained with a backside illuminated device. In this paper we present measured quantum efficiency as a function of temperature, and we describe a novel clocking scheme to measure serial charge transfer efficiency. We demonstrate an industrial application in which the CCD is more than an order of magnitude more sensitive than a commercial camera using a standard CCD.

Paper Details

Date Published: 18 August 1998
PDF: 6 pages
Proc. SPIE 3505, Imaging System Technology for Remote Sensing, (18 August 1998); doi: 10.1117/12.317844
Show Author Affiliations
Richard J. Stover, UCO/Lick Observatory (United States)
Mingzhi Wei, UCO/Lick Observatory (United States)
Y. Lee, Beijing Astronomical Observatory (China)
David Kirk Gilmore, UCO/Lick Observatory (United States)
Steven E. Holland, Lawrence Berkeley National Lab. (United States)
Donald E. Groom, Lawrence Berkeley National Lab. (United States)
William W. Moses, Lawrence Berkeley National Lab. (United States)
Saul Perlmutter, Lawrence Berkeley National Lab. (United States)
Gerson Goldhaber, Lawrence Berkeley National Lab. (United States)
Carlton R. Pennypacker, Lawrence Berkeley National Lab. (United States)
N. W. Wang, Lawrence Berkeley National Lab. (United States)
Nicholas P. Palaio, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 3505:
Imaging System Technology for Remote Sensing
Mingzhi Wei; Xinjian Yi; Jianzhong Han; Fiodor F. Sizov, Editor(s)

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