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Proceedings Paper

Fabrication and performance of diffractive optics for quantum well infrared photodetectors
Author(s): Frederick S. Pool; Daniel W. Wilson; Paul D. Maker; Richard E. Muller; John J. Gill; Deepak K. Sengupta; John K. Liu; Sumith V. Bandara; Sarath D. Gunapala
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Paper Abstract

Diffractive optical elements (microlenses) for quantum well infrared photodetectors (QWIPs) were fabricated by two techniques: (1) standard lithography of a binary optical structure and (2) PMMA pattern transfer for an analog diffractive optic structure. The binary lenses were fabricated by sequential contact lithography and etching using two binary masks. The analog diffractive lenses were fabricated in PMMA by direct-write e-beam lithography followed by acetone development. The resulting PMMA surface relief profile was transferred into the GaAs by dry etching. Both types of lenses were etching into GaAs using an electron cyclotron resonance (ECR) microwave plasma etching system. Although the lenses were fabricated accurately, the performance of the QWIPs was not improved as much as expected due to the angle-of-incidence sensitivity of the QWIP light-coupling grating. The lenses would have likely improved the performance of detectors capable of absorbing normally incident light.

Paper Details

Date Published: 22 July 1998
PDF: 8 pages
Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); doi: 10.1117/12.317608
Show Author Affiliations
Frederick S. Pool, Jet Propulsion Lab. (United States)
Daniel W. Wilson, Jet Propulsion Lab. (United States)
Paul D. Maker, Jet Propulsion Lab. (United States)
Richard E. Muller, Jet Propulsion Lab. (United States)
John J. Gill, Jet Propulsion Lab. (United States)
Deepak K. Sengupta, Jet Propulsion Lab. (United States)
John K. Liu, Jet Propulsion Lab. (United States)
Sumith V. Bandara, Jet Propulsion Lab. (United States)
Sarath D. Gunapala, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 3379:
Infrared Detectors and Focal Plane Arrays V
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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