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Proceedings Paper

Test structures and performance analysis for uncooled resistance bolometer detector arrays
Author(s): Kevin Charles Liddiard; Olaf Reinhold; Ulf Ringh; Christer Jansson
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Paper Abstract

The performance of uncooled infrared focal plane detector arrays depends on optimization of critical parameters which are determined by geometrical design and the electrical, optical and thermophysical properties of the detector materials. It is desirable to monitor these parameters during array preparation using test cells which are independent of the main array and which can subsequently be used to provide data for performance analysis. This paper describes the use of test structures which function as process control modules and monitor cells for material parameters, from which array operability and performance can be assessed. The focal plane detector arrays described in the paper were designed by Electro-optic Sensor Design and manufactured by the Defence Science and Technology Organization, Australia, in collaboration with the Defence Research Establishment, Sweden.

Paper Details

Date Published: 22 July 1998
PDF: 11 pages
Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); doi: 10.1117/12.317578
Show Author Affiliations
Kevin Charles Liddiard, Electro-optic Sensor Design (Australia)
Olaf Reinhold, Defense Science and Technology Organization (United States)
Ulf Ringh, National Defense Research Establishment (Sweden)
Christer Jansson, National Defense Research Establishment (Sweden)

Published in SPIE Proceedings Vol. 3379:
Infrared Detectors and Focal Plane Arrays V
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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