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Proceedings Paper

Thin-film transistor array technology for high-performance direct-conversion x-ray sensors
Author(s): Willem den Boer; Steven Aggas; Young H. Byun; Tieer Gu; Johnny Q. Zhong; Scott V. Thomsen; Lothar S. Jeromin; Denny L. Y. Lee
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Paper Abstract

Thin Film Transistor (TFT) array technology is presented for Digital X-ray Sensors in Direct Radiography applications. Circuit simulations were performed to optimize the design of the TFT array. The sensor array uses a combination of a mushroom electrode with a high fill factor of 86% and a polymer passivation dielectric to minimize column capacitance and improve signal-to-noise ratio. A 14 in. X 8.5 in. sensor array with 1536 X 2560 pixels was developed using this technology. The TFT arrays are processed entirely in Class 1 clean room environments to eliminate line defects and minimize pixel defects. The best 14 in. X 8.5 in. panels have exhibited fewer than 0.001% pixel defects, as detected during in process testing prior to Se coating. In typical image quality comparisons with conventional X-ray film/screen combinations, the digital X-ray sensor exhibited equal or better performance than film-screens. Clinical studies were also conducted. Radiologists concluded that diagnostically significant projection radiographic images can be produced with the new digital X-ray sensor that are equivalent or superior to conventional film/screen images at the same X-ray exposures. The detector recently received FDA approval.

Paper Details

Date Published: 24 July 1998
PDF: 9 pages
Proc. SPIE 3336, Medical Imaging 1998: Physics of Medical Imaging, (24 July 1998); doi: 10.1117/12.317054
Show Author Affiliations
Willem den Boer, OIS Optical Imaging Systems, Inc. (United States)
Steven Aggas, OIS Optical Imaging Systems, Inc. (United States)
Young H. Byun, OIS Optical Imaging Systems, Inc. (United States)
Tieer Gu, OIS Optical Imaging Systems, Inc. (United States)
Johnny Q. Zhong, OIS Optical Imaging Systems, Inc. (United States)
Scott V. Thomsen, OIS Optical Imaging Systems, Inc. (United States)
Lothar S. Jeromin, Sterling Diagnostic Imaging, Inc. (United States)
Denny L. Y. Lee, Sterling Diagnostic Imaging, Inc. (United States)


Published in SPIE Proceedings Vol. 3336:
Medical Imaging 1998: Physics of Medical Imaging
James T. Dobbins; John M. Boone, Editor(s)

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