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Proceedings Paper

Developed wavelength-scanning interferometry and its application for distance measurement
Author(s): Yong Wang; Yanbiao Liao; Qian Tian; Enyao Zhang; Min Zhang
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Paper Abstract

A developed wavelength scanning fiber-optic interferometry has been studied in this paper. Using this method for distance/displacement measurement, we adopt a tunable external cavity semiconductor laser to simultaneously illuminate two Fabry-Perot interferometers, one as the sensing interferometer, the other as the reference interferometry. We analyze the characteristics of the scanning source and the interferometric signals, then illustrate the limitation of the measurement accuracy and resolution in terms of theory. The experimental results show that the accuracy of 0.05 micrometers and resolution of 0.01 micrometers are achieved, in the range of 1 mm.

Paper Details

Date Published: 21 July 1998
PDF: 9 pages
Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); doi: 10.1117/12.316974
Show Author Affiliations
Yong Wang, Tsinghua Univ. (China)
Yanbiao Liao, Tsinghua Univ. (China)
Qian Tian, Tsinghua Univ. (China)
Enyao Zhang, Tsinghua Univ. (China)
Min Zhang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 3330:
Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials
Richard O. Claus; William B. Spillman, Editor(s)

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