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Proceedings Paper

Optical-fiber-interconnected MEMS sensors and actuators
Author(s): Michael B. Miller; Scott A. Meller; Thomas A. Wavering; Jonathan A. Greene; Kent A. Murphy
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Paper Abstract

Microelectromechanical systems or MEMS are miniature devices that have several advantages over conventional sensing and actuating technology. MEMS devices benefit form well developed integrated circuit production methods which ensure high volume, high yield processes that create low-cost sensors and actuators. OPtical fiber interconnected MEMS will provide new functionality in MEMS devices such as multiplexed operation for distributed sensing applications. This paper presents approaches in optical fiber to MEMS interfacing and some preliminary results.

Paper Details

Date Published: 21 July 1998
PDF: 6 pages
Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); doi: 10.1117/12.316971
Show Author Affiliations
Michael B. Miller, F&S Inc. (United States)
Scott A. Meller, F&S Inc. (United States)
Thomas A. Wavering, F&S Inc. (United States)
Jonathan A. Greene, F&S Inc. (United States)
Kent A. Murphy, F&S Inc. (United States)


Published in SPIE Proceedings Vol. 3330:
Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials
Richard O. Claus; William B. Spillman, Editor(s)

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