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Proceedings Paper

Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications
Author(s): Hans-Klaus Roth; Constantine D. Skordoulis; M. Schroedner; I. Stohn; A. Bolovinos; E. Bakalis
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Paper Abstract

It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.

Paper Details

Date Published: 14 July 1998
PDF: 4 pages
Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316612
Show Author Affiliations
Hans-Klaus Roth, Technische Hochschule Leipzig (Germany)
Constantine D. Skordoulis, Univ. of Ioannina (Greece)
M. Schroedner, Thueringisches Institut fuer Textil und Kunststoff Forchung e.V. (Germany)
I. Stohn, Thueringisches Institut fuer Textil Kunststoff Forchung e.V. (Germany)
A. Bolovinos, Univ. of Ioannina (Greece)
E. Bakalis, Univ. of Ioannina (Greece)

Published in SPIE Proceedings Vol. 3423:
Second GR-I International Conference on New Laser Technologies and Applications
Alexis Carabelas; Paolo Di Lazzaro; Amalia Torre; Giuseppe Baldacchini, Editor(s)

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