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Proceedings Paper

Laser-induced deposition and etching of tungsten microstructures
Author(s): K. Piglmayer; H. Schieche; R. Chabicovsky
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Paper Abstract

Micron-sized deposition and etching of W in WF6 + H2 atmosphere is investigated by local laser-induced heating of thin tungsten layers on quartz substrates. The process is strongly dependent on the partial pressures of the two gases. A process with high amount of hydrogen permits deposition of W, whereas etching of W occurs if the working gas does not contain hydrogen.

Paper Details

Date Published: 14 July 1998
PDF: 5 pages
Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316606
Show Author Affiliations
K. Piglmayer, Johannes-Kepler-Univ. Linz (Austria)
H. Schieche, Johannes-Kepler-Univ. Linz (Austria)
R. Chabicovsky, Technischel Univ. Wien (Austria)


Published in SPIE Proceedings Vol. 3423:
Second GR-I International Conference on New Laser Technologies and Applications
Alexis Carabelas; Paolo Di Lazzaro; Amalia Torre; Giuseppe Baldacchini, Editor(s)

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