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Proceedings Paper

Pulsedlaser deposition and laser machining of diamondlike carbon films
Author(s): Sergio Martellucci; Giovanni Messina; A. Paoletti; Maria Richetta; S. Santangelo; A. Spena; Antonello Tebano; A. Tucciarone
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Paper Abstract

Recently the application of pulsed laser deposition (PLD) technique to grow different material of relevant interest for applications, especially in the field of micro devices, has been considered. We show that thin films of diamond like carbon (DLC) can be grown by means of the PLD technique, using an XeCl excimer laser. Their characterization was carried out by SEM, Raman spectroscopy and microindenter. We started a study on the etching mechanism of DLC films for possible applications in microsystems technology.

Paper Details

Date Published: 14 July 1998
PDF: 7 pages
Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316604
Show Author Affiliations
Sergio Martellucci, Univ. degli Studi di Roma Tor Vergata (Italy)
Giovanni Messina, Univ. degli Studi di Reggio Calabria (Italy)
A. Paoletti, Univ. degli Studi di Roma Tor Vergata (Italy)
Maria Richetta, Univ. degli Studi di Roma Tor Vergata (Italy)
S. Santangelo, Univ. degli Studi di Reggio Calabria (Italy)
A. Spena, Univ. degli Studi di Roma Tor Vergata (Italy)
Antonello Tebano, Univ. degli Studi di Roma Tor Vergata (Italy)
A. Tucciarone, Univ. degli Studi di Roma Tor Vergata (Italy)


Published in SPIE Proceedings Vol. 3423:
Second GR-I International Conference on New Laser Technologies and Applications

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