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Proceedings Paper

Diagnostics of the laser deposition process by optical methods
Author(s): Francesco Fuso
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Paper Abstract

We use optical methods for in-situ diagnostics in pulsed laser deposition of high temperature superconductive thin films. Our interest is focused on the composition modifications experienced by the plume of ablated material during its expansion from the target to the substrate in a molecular oxygen environment, which constitute a key point for the attainment of the correct film stoichiometry. Our diagnostics, based on absorption spectroscopy of atomic oxygen, provide a reliable tool for accurate analysis of the molecular oxygen dissociation involved in the reactive- collisional processes.

Paper Details

Date Published: 14 July 1998
PDF: 5 pages
Proc. SPIE 3423, Second GR-I International Conference on New Laser Technologies and Applications, (14 July 1998); doi: 10.1117/12.316603
Show Author Affiliations
Francesco Fuso, INFM and Univ. degli Studi di Pisa (Italy)

Published in SPIE Proceedings Vol. 3423:
Second GR-I International Conference on New Laser Technologies and Applications
Alexis Carabelas; Paolo Di Lazzaro; Amalia Torre; Giuseppe Baldacchini, Editor(s)

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