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Proceedings Paper

Surface topography by wavelength scanning interferometry
Author(s): Ichirou Yamaguchi; Akihiro Yamamoto; Masaru Yano
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Paper Abstract

Parallel and absolute measurement of surface shape using wavelength scanning interferometry has been applied to various objects including diffuse surfaces and milled ones having discontinuities such s steps, dips, and protrusions. We have employed not only the Michelson setup but also the Fizeau one newly introduced. The behaviors of interference signals arising from these objects are experimentally compared. Spiky noises have been observed from the milled surfaces and the defocused diffuse surface. In spite of the noise we succeeded in measuring steps and narrow dips on a mirror and a milled surface, as well as a cylindrical protrusion on a diffuse surface. With a dye laser of tuning range of 4.2 nm we attained the resolution of 39 micrometer within the depth of 3 mm.

Paper Details

Date Published: 6 July 1998
PDF: 10 pages
Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316455
Show Author Affiliations
Ichirou Yamaguchi, RIKEN--The Institute of Physical and Chemical Research (Japan)
Akihiro Yamamoto, RIKEN--The Institute of Physical and Chemical Research (Japan)
Masaru Yano, Saitama Univ. (Japan)

Published in SPIE Proceedings Vol. 3479:
Laser Interferometry IX: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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