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Proceedings Paper

Adjustable coherence depth in a geometrically desensitized interferometer
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Paper Abstract

Geometrically desensitized interferometry uses two beams at different incident angles to generate an interference pattern with an equivalent wavelength of 5 to 20 micrometers. Unlike conventional interferometers, the fringe contrast is primarily a function of the optical geometry, rather than the spectral properties of the source light. In particular, a line-shaped source provides either a narrow or broad contrast envelope, depending on the orientation of the line with respect to the plane of incidence. This adjustable coherence depth is useful for initial system alignment, depth scanning and for separating surfaces of transparent flat parts.

Paper Details

Date Published: 6 July 1998
PDF: 10 pages
Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316446
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 3479:
Laser Interferometry IX: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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