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Proceedings Paper

Development of a combined optical and x-ray interferometer (COXI) system for nanometrology
Author(s): Noh Bin Yim; Min Seok Kim; Cheon Il Eom
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Paper Abstract

In the COXI (Combined Optical and X-ray Interferometer) system, optical and x-ray interferometers are combined to provide a means for the calibration of transducers with the traceability to the standards of length in the sub-nanometer region. The COXI mainly comprises a laser interferometer, an x-ray interferometer, and a precision translation stage. The laser interferometer used for the COXI instrument was a Michelson type, differential heterodyne interferometer having common optical path. A monolithic x-ray interferometer was made from a silicon single crystal. We have designed a control procedure to operate the COXI instrument for the calibration of nano-transducers and developed a phase demodulator for use with the laser interferometer. The bandwidth, phase resolution, and the measurement uncertainty of the interferometer were found 1 kHz, 0.01 degree, and 0.1 degree, respectively.

Paper Details

Date Published: 6 July 1998
PDF: 8 pages
Proc. SPIE 3479, Laser Interferometry IX: Applications, (6 July 1998); doi: 10.1117/12.316438
Show Author Affiliations
Noh Bin Yim, Korea Advanced Institute of Science and Technology (South Korea)
Min Seok Kim, Korea Advanced Institute of Science and Technology (South Korea)
Cheon Il Eom, Korea Research Institute of Standards and Science (South Korea)

Published in SPIE Proceedings Vol. 3479:
Laser Interferometry IX: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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