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Proceedings Paper

Sinusoidal wavelength-scanning interferometers
Author(s): Osami Sasaki; Kenichiro Tsuji; Shouichi Sato; Tomokazu Kuwahara; Takamasa Suzuki
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Paper Abstract

In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detecting sinusoidal phase-modulation amplitude of the interference signal. This interference signal is produced by scanning sinusoidally wavelength of a light source. If the measurement accuracy in POD is higher than half of the central wavelength, this measured value is combined with a fractional value of the OPD which is obtained from the conventional phase of the interference signal. The measurement accuracy in POD is higher as the scanning width of wavelength is larger. We propose two different methods to create a light source with a large scanning width of wavelength by using superluminenscent laser diode and external-cavity tunable laser diode. Experimental results clearly show that sinusoidal wavelength-scanning interferometers using these light sources measure an OPD over a few tens of microns with a high accuracy of a few nm.

Paper Details

Date Published: 30 June 1998
PDF: 8 pages
Proc. SPIE 3478, Laser Interferometry IX: Techniques and Analysis, (30 June 1998); doi: 10.1117/12.312959
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Kenichiro Tsuji, Niigata Univ. (Japan)
Shouichi Sato, Niigata Univ. (Japan)
Tomokazu Kuwahara, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 3478:
Laser Interferometry IX: Techniques and Analysis
Malgorzata Kujawinska; Gordon M. Brown; Mitsuo Takeda, Editor(s)

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